Improve Product Performance and Mixing Efficiency, Increase Reliability, and Reduce Manufacturing Costs by Leveraging Direct Metal Printing to Produce with Optimized Form Factors and More Efficient Gas Pathways
20:1
component reduction
100%
leak-proof
3x
more efficient

Reduce Part Count While Improving Gas Conveyance and Mixing Efficiency

A 3D printed Gas Mixer

Metal 3D printed cross section of a gas mixer with active cooling

Conveying caustic gas into a sealed process chamber is typical in wet processing systems such as cleaning and etching semiconductor capital equipment. Therefore, efficient conveyance of gases, whether they need to remain separate or mix, with no leakage, limited flow turbulence, and through minimal apertures in the process chamber, is critical. This involves complex, multi-component gas mixers and feeder assemblies made of corrosive-gas-resistant materials.

This can all be optimized using direct metal 3D printing solutions and semiconductor equipment expertise from 3D Systems. Gas conveyance systems can be designed with fewer components to fit in smaller spaces with higher reliability. In addition, optimized, higher complexity gas mixers can be developed in far less time to deliver more effective mixing, faster. 

The Benefits of Metal Additive Manufacturing

  • Semiconductor Design Flexibility - Gas Conveyance

  • Design Flexibility

    Additive manufacturing makes it possible to optimally design, and rapidly iterate and manufacture gas feeders and mixers within tight spaces, with numerically modeled gas pathways that reliably convey and efficiently mix gases toward the process chamber.

  • Semiconductor Clean Room Environments

  • High Quality and Accuracy for Clean Room Environments

    High material quality, fine part details and accuracy produced in an inert atmosphere with a steady, ultra-low oxygen level—coupled with proprietary processes for optimal particle cleanliness—result in metal parts that meet clean room requirements and are fit for use in semiconductor equipment.

  • Performance and Productivity

    A reduction in gas flow turbulence enables an accurate and even spread of cleaning and etching gases, increasing overall system efficiency and throughput to process more wafers. Additive manufacturing also delivers structurally optimized gas feeders with reduced part counts and assemblies. Replacing multipart assemblies with monolithic parts increases reliability, improves manufacturing yield, and reduces labor costs.

Optimizing Gas Conveyance and Mixing

  • Improve Gas Flow Efficiency - Gas Conveyance

    Improve Gas Flow Efficiency

    Additive manufacturing gives semiconductor equipment engineers unprecedented design flexibility. They are able to unlock novel internal patterns, nozzle shapes, and mixing chambers, thus optimizing gas flow and mixing for maximum performance and efficiency.

  • a technician holding a wafer

    Increase Reliability

    Additive manufacturing delivers structurally optimized gas feeders and mixers with reduced part counts and assemblies. This greatly increases component reliability by eliminating fluid leakage at connections under the highest temperatures and operating pressures for higher component integrity.

  • Semiconductor Gas Mixer with ruler

    Minimize Volume

    Thinner walls and component consolidation deliver leak-tight integrity and enable more efficient functionality in a smaller package size. Produce multi-axis features and trapped volumes with significant ease compared to traditional manufacturing processes.

Resources

  • Semiconductor ebook cover

    Rapidly Adopt and Scale Metal Additive Manufacturing

    In this eBook, you’ll learn how 3D Systems’ decades of experience and expertise helps integrate metal AM to drive performance, productivity, and reliability improvements for semiconductor capital equipment manufacturers and suppliers.

    Get the eBook
  • Silicon Wafers and Microcircuits sitting on a robot arm

    Additive Manufacturing for Semiconductor Capital Equipment

    Discover how 3D Systems’ metal additive manufacturing can give semiconductor capital equipment manufacturers and suppliers the capabilities they need to improve performance, productivity, and reliability.

    Read our Brochure

More Semiconductor Applications

hand holding a dmp manifold fluid flow optimization image alt

Manifold Fluid Flow Optimization
semiconductor wafer table thermal management link

Wafer Table Thermal Management

Linear Stage Cooling

Showerhead Optimization

Flexure and Structural Optimization

Learn More About Gas Conveyor and Mixer Manufacturing Solutions

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DMP Factory 500

Robust, high quality metal AM with integrated powder management

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Oxidation, corrosion and extremely high-temperature resistant

3D Systems 3DXpert hero image

3DXpert

All-in-One Integrated Software for Industrial Additive Manufacturing

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  • Application Innovation Group

    Our team can help you solve your most difficult design and production challenges with additive manufacturing solutions. Together we’ll identify your needs, working with you to optimize your designs, prototype, validate and define a manufacturing flow.
    Find out more